A CMOS single-photon avalanche diode(SPAD)-based quarter video graphics array image sensorwith 8-μm pixel pitch and 26.8% fill factor (FF) is presented.The combination of analog pixel electronics and scalable shared wellSPAD devices facilitates high-resolution, high-FF SPADimaging arrays exhibiting photon shot-noise-limited statistics.The SPAD has 47 counts/s dark count rate at 1.5 V excess bias(EB), 39.5% photon detection probability (PDP) at 480 nm, anda minimum of 1.1 ns dead time at 1 V EB. Analog single-photoncounting imaging is demonstrated with maximum 14.2-mV/SPADevent sensitivity and 0.06e− minimum equivalent read noise.Binary quanta image sensor (QIS) 16-kframes/s real-timeoversampling is shown, verifying single-photon QIS theory with4.6× overexposure latitude and 0.168e− read noise.
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